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ELEG 52903. Integrated Circuits Fabrication Laboratory. 3 Hours.

Experimental studies of silicon oxidation, solid-state diffusion, photolithographical materials and techniques, bonding and encapsulation. Fabrication and testing of PN diodes, NPN transistors and MOS transistors. Prerequisite: ·¡³¢·¡³ÒÌý52103. (Typically offered: Irregular)

Materials Science and Engineering (MSEN)

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...MSEN 57303 Fabrication at the Nanoscale OR ELEG 52903 Integrated Circuits Fabrication Laboratory OR MEEG...