闪播福利库

Theory and techniques of integrated circuit fabrication technology; crystal growth, chemical vapor deposition, impurity diffusion, oxidation, ion implantation, photolithography and medullization. Design and analysis of device fabrication using SUPREM and SEDAN. In-process analysis techniques. Student review papers and presentations on state of the art fabrication and device technology. Prerequisite: 贰尝贰骋听42003 or 贰尝贰骋听52003. (Typically offered: Irregular)